Abstract
This study presented the lens profile modification process in liquid-phase medium. The radius of curvature of the photopolymer droplet can be modified by changing the ambiance during processing. This study further investigates the formation of polymer plano-convex and biconvex lens in a multi-phase ambience. This study further reports a new approach to fabricate discrete micro ball lens in a gravity-free and non-wetting liquid ambient. The liquid photopolymer, which is suspended and insoluble in the liquid medium, will form a sphere caused by the surface tension. After that, the photopolymer is solidified inside the liquid medium by using the UV-light to define the lens shape. The liquid-phase formed lens is with high surface quality. The formation of such polymer ball lens can also be achieved on the Si substrate with suspended micromachined structures. Such ball lens is easily employed for SiOB with optical axis in in-plane as well as out-of-plane directions. This study designs a polymer joint as a thermal isolation component to reduce the current and heat flow between micro thermal actuators for optical image stabilizer application. The optical stage is consisted of the V-beam thermal actuators for light tracking. To reduce the thermal coupling (through heat conduction) between these four actuators fabricated by SOI wafer, those components are connected by the low thermal conductivity joints.