Abstract
Integrated micro-optical/optoelectronic system provides a promising approach that multiple and functional optical elements can be integrated on a single chip. As compared to the conventional optical/optoelectronic systems, the size, weight, assembly, adjusting time, and cost of the integrated systems are greatly reduced. In this dissertation, two novel and simple fabrications of refractive vertical microlenses were demonstrated. The microlenses are spherical-shaped and have very high NA value after the reflow processes. As proven, the beam emitted from an edge-emitting laser diode with high divergence angle (θ = 40□) was successfully converged to less than 5□. These vertical microlenses will find their potential in the micro-optical/optoelectronic systems. Another micro-ball-lens integrated InGaAs p-i-n high speed photodiode is also proposed to enlarge the alignment tolerance. According to the results, as we integrate a d = 250-um ruby micro-ball-lens on the photodiode, the alignment tolerance will be 7.1-fold * 10-fold to the bare chip without microlens. Such wild alignment tolerance would be a great improvement for the package technique nowadays. In addition, with the Monte-Carlo ray trace simulation, we can predict and optimize the performances of these refractive microlens integrated optical systems.