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撓性可拉伸式多功晶片網路之設計與實現
Dissertation

撓性可拉伸式多功晶片網路之設計與實現

宋緯倫
Doctor of Philosophy (PHD), 國立清華大學, 動力機械工程學系
2015

Abstract

大面積電子元件 可拉伸彈簧 微機電製程 可回復性 可撓性 Large area electronics Stretchable spring MEMS micromachining Recoverable Flexible
This study designed and implemented the multi-device integration of a flexible large area chip network using stretchable springs. The functional devices are directly implemented and integrated on the nodes of a chip network distribution, and the nodes are mechanically and electrically connected to surrounding nodes by stretchable springs. The springs can stretch and expand the distance between functional devices by several orders of magnitude to construct a large area chip network with interconnected devices. This study using the stretchable springs as a main purpose, and construct four different designs, features, manufacturing process and functional devices integrated for various applications. (1) Large area chip network using stretchable electroplated copper springs. (2) Devices integration with stretchable wire embedded in long PDMS-fiber. (3) Polymer springs with embedded CNTs electrical routing for large area electronics. (4) Large area devices using silicon stretchable springs. The study was implemented the four unique stretchable devices with large area, stretchable, flexible and multi-functional integrated. The future can be applied to a variety of large area electronics and wearable devices.

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