Abstract
The standard CMOS process has been extensively applied to fabricate MEMS devices. The major advantage of the CMOS process is the monolithic integration of the IC and MEMS components. This study presents a novel post-CMOS process to realize the integration of in-plane and out-plane fully-differential capacitance sensing accelerometers on a single chip. Thus, the monolithic multi-axes fully differential sensing accelerometer is achieved. In application, the accelerometer has been implemented using CMOS process plus the post-release technique. In circuit part, mainly use the pre-amplifier to detect the capacitance change due to acceleration. Examine through the experiment amount to prove that the function of the pre-amplifier. finally, three axis accelerometer sensor that this research institute develops are examined and analyzed through the experiment amount, can further affirmation CMOS process make to accelerometer sensor feasibility, have a chance commercialized even more in the future.