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新型微透鏡點膠成形技術開發及其與微機電製程技術之整合
Dissertation

新型微透鏡點膠成形技術開發及其與微機電製程技術之整合

蕭勝議
Doctor of Philosophy (PHD), 國立清華大學, 動力機械工程學系
2008

Abstract

點膠透鏡 製程整合 微凹透鏡 液態透鏡成形 dispensing lens liquid phase formed lens micro concave lens process integration
Micro-lenses play important roles in MOEMS. Convex micro-lenses are widely studied, especially for applications in optical fiber related researches. Beside the optical coupling application, it seems that the micro-lenses application is limited. Moreover, the miniature lenses are difficult to handle. As a result, precise position control and assembly are needed. To provide better chance for micro-lenses, the main solution is to develop as many types of micro-optical components as possible so as to create more feasibility. Some problems are solved in this study. A novel concave microlens is proposed and hopefully might lead colleagues to solve the aberration produced by single lens. A simple dispensing technology is compatible with different liquid materials. Moreover, the technology is integrated with various MEMS processes. Thus, with various materials and various integrated platforms, the micro lens is going to find more possibilities. MEMS devices such as sensors, actuators are relatively well-developed comparing with micro lenses. Integrating dispensing lens technology with well-developed MEMS devices can make itself to perform more practical functionality.

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