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磊晶BaTiO3/LaNiO3人工超晶格特性之研究
Dissertation

磊晶BaTiO3/LaNiO3人工超晶格特性之研究

梁元彰
Doctor of Philosophy (PHD), 國立清華大學, 材料科學工程學系
2003

Abstract

人工超晶格 X光反射率 界面粗糙度 成長機制 superlattice Xray reflectivity interface roughness growth mode
Artificial superlattices consisting of ferroelectric BaTiO3 (BTO) and conductive LaNiO3 (LNO) sublayers were epitaxially grown on SrTiO3 (001) single crystal substrates by a dual-gun rf magnetron sputtering system. The formation of superlattice structure was confirmed from the x-ray reflectivity curves and (0 0 L) Bragg reflection of x-ray. A partial but nearly constant relaxation of in-plane strain in the superlattices was observed, even though the sublayer thickness is below the critical value for the generation of misfit dislocations. X-ray reflectivity measurement reveals that the superlattices with stacking period below 20nm have about the same interface roughness of BTO/LNO. Consequently, nearly the same extent of dielectric enhancement results from the strained BTO layer, along with a highly conductive interface zone in the superlattiecs. On the other hand, in-situ, real-time synchrotron x-ray scattering experiment confirms the occurrence of lattice strain relaxation in the superlattice with stacking period below critical value (BTO-3nm/LNO-3nm), and the experimentally evaluated total thickness of the superlattice for the onset of strain relief is satisfactorily close to the prediction from theoretical calculation. Moreover, observation of roughness scaling behavior in the initial growth of epitaxial BTO/LNO superlattices indicates that the strain plays an important role in the evolution of microstructure in superlattices.

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