Abstract
According to their compact size, batch production, and the integration of the mechanical structures with the electronics into a system chip, MEMS-based vibratory microgyroscopes can be widely used in the vehicle safety and navigation, virtual reality, unmanned aerial vehicles, automation, and medical industry. The operational principle is mainly based on the transfer of mechanical energy between a vibrating element and a sensing element through the Coriolis acceleration. Although the principle is the same, the design of microgyroscopes varies, such as ring type, tuning fork type and wheel type etc. Since the micromachining fabrication processes are dramatically improved, the mechanical performance of vibrating microgyroscope is promoting continuously. Normally, the mechanical performance of gyroscopes depends on manufacturing process. However, the mechanical decoupling design is more vitally related with the performance of gyroscopes. The more serious mechanical coupling is, the higher cross axis sensitivity will become. Therefore, this research will present a decoupled z-axis microgyroscope and two decoupled dual-axis vibrating wheel microgyroscopes. Combining z-axis gyroscope with dual-axis wheel gyroscope, the measurement of 3-axis angular rates could be realized. Once the 3-axis accelerometers could be further integrated, the construction of the micro inertial measurement unit will be fulfilled.