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超微晶奈米鑽石/一維矽奈米線 (UNCD/SiNWs) 陣列場發射元件之製作與研究
Dissertation

超微晶奈米鑽石/一維矽奈米線 (UNCD/SiNWs) 陣列場發射元件之製作與研究

曾鈺芬
Doctor of Philosophy (PHD), 國立清華大學, 材料科學工程學系
2006

Abstract

奈米鑽石 矽奈米線 矽陣列 場發射元件
Abstract In this thesis, one-dimensional Si nano-materials with different morphologies were prepared by electroless metal deposition (EMD) process on different oriented Si wafers. Ultra-nanocrystallined diamond (UNCD) films were deposited on these one-dimensional Si nanowire (SiNW) array templates by microwave plasma enhanced chemical vapor deposition (MPECVD) method as field emission devices. Electroless metal deposition (EMD) process was used to prepare large area SiNWs array with different wire diameters and densities on patterned Si wafers; dendrite SiNW arrays could also be prepared. Field emission properties of these SiNW arrays are strongly correlated with the wire diameters and densities of SiNW arrays. Turn-on field (E0) decreased from 8.8 V/□m to 7.6 V/ □m as the diameter of SiNW arrays decrease; dendrite SiNW arrays could further decrease the turn-on field to 2.0 V/□m. The relationships between field emission properties and growth mechanism of different morphologies SiNW arrays are discussed. In order to further improve the field emission properties, UNCD films were deposited on these SiNW array templates by MPECVD method with different pre-nucleation techniques. The field emission properties of these one-dimensional nano-materials are improved significantly by covering UNCD on surface, the turn-on field decreased from 7.6 V/□m to 3.8 V/□m. The effects of different pre-nucleation technique on field emission properties of UNCD covered SiNW arrays are also discussed.

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