Abstract
Ion Beam is a powerful tool in Material Research due to the unique capability of analysis and modification of material. The thesis reports my research works using the ion beam produced from accelerators in Tsing Hua University, including RBS/w Channeling, Elastic Recoiled Detection, Particle Induced X-ray Emission, Ion Implantation,αradioactive source preparation by recoiled implantation and stopping power measurement using partial coated Si detector. We have successfully built a complete detection and analysis system for the studies of RBS/w Channeling, Elastic Recoiled Detection, and Particle Induced X-ray Emission. The results of Ion Implantation andαradioactive source preparation show the potential for further applications and researches of material science.