Abstract
Abstract The purpose of this study is to measure the energy loss behavior of ions with MeV energies in matter. The ions of interest, including 3He/4He, 6Li/7Li, and 10B/11B, were investigated indepth. A partially-coated silicon detector (with aluminium, sliver, and gold thin film) and a self-supported compound foil detector (such as polycarbonate, polyethylene terephthalate, and polypropylene) were especially designed for the detection measurements. From this study, the measured stopping forces of those ions in matter were in good agreement with the evaluations yielded by SRIM 2003 and other findings. The results also demonstrated that the energy loss measurement could be successfully achieved with the use of a partially coated detector and a self-supported foil detector. The measured stopping forces of various isotopes with the same velocity were almost equal. It means that the heavier isotope has a small stopping force, when bombarding energies are below the electronic stopping maximum. A reverse shift occurs as the incident-ion energies are higher than the maximum. The results also revealed that the experimental energy loss stragglings approached the theoretical predictions at the higher energy region. In the lower energy region, the measured data had some deviations with the predictions. Further, the measurements for the polymer foils confirmed the validity of the use of Bragg’s rule for the stopping force and energy loss straggling in this energy region. Furthermore, a modified Monte-Carlo simulation program based the EGS4 code together with energy loss and straggling data was successfully developed for the simulation of the ion implantation. The results showed that the calculations were in good agreement with the experimental data and the theoretical results yielded by SRIM 2003. The applicability of this code is that both the source and the target are flexible to be described as either a 2-dimensional or 3-dimensional shape