Editorial: Design and analysis of CMOS-MEMS transducers

社論

開放取用(OA)

Anurag Zope 和 Sheng-Shian Li

Frontiers in Mechanical Engineering, 卷.9, 1142981

2023

摘要

actuator

CMOS-MEMS

integration

sensor

transducer

Materials Science (all)

Mechanical Engineering

Computer Science Applications

Industrial and Manufacturing Engineering

url

https://doi.org/10.3389/fmech.2023.1142981檢視

已出版(紀錄版本) 開放

1 檢視次數

題名: Editorial: Design and analysis of CMOS-MEMS transducers
翻譯題名: Editorial: Design and analysis of CMOS-MEMS transducers
創作者：: Anurag Zope (作者) - National Tsing Hua University
Sheng-Shian Li (作者) - Institute of NanoEngineering and MicroSystems , National Tsing Hua University
學術資源類型: 社論
出版日期: 2023
出版資訊: Frontiers in Mechanical Engineering, 卷.9, 1142981
語言: 英語