- Title
- Guest editorial: Equipment and operations automation in the semiconductor industry
- Creators - without role
- James R. Morrison - Korea Advanced Institute of Science and TechnologyChen-Fu Chien - National Tsing Hua UniversityStéphane Dauzère-Pérès - Mines Saint-ÉtienneMilind Dawande - The University of Texas at DallasHan Ding - Shanghai Jiao Tong UniversityJeffrey S. Pettinato - Intel (United States)Jingang Yi - Rutgers, The State University of New Jersey
- Publication Details
- IEEE Transactions on Automation Science and Engineering, Vol.8(1), pp.1-4
- Identifiers
- 9957768186006774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Editorial
Editorial
Guest editorial: Equipment and operations automation in the semiconductor industry
IEEE Transactions on Automation Science and Engineering, Vol.8(1), pp.1-4
01/2011
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