- Title
- Semiconductor manufacturing
- Creators - without role
- F. Frank Chen - The University of Texas at San AntonioChen-Fu Chien - Department of Industrial Engineering and Engineering Management , National Tsing Hua UniversityYi-Chi Wang - Feng Chia University
- Publication Details
- Flexible Services and Manufacturing Journal, Vol.25(3), pp.283-285
- Identifiers
- 9957769095106774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Editorial
Editorial
Semiconductor manufacturing
Flexible Services and Manufacturing Journal, Vol.25(3), pp.283-285
09/2013
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