Turning proceedings articles into archival, peer-reviewed papers

Editorial

Open access

Peer reviewed

Journal of Microlithography, Microfabrication and Microsystems, Vol.5(2), 020101

04/2006

Abstract

Atomic and Molecular Physics

and Optics

Electrical and Electronic Engineering

url

https://doi.org/10.1117/1.2213981View

Published (Version of record) Open

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Title: Turning proceedings articles into archival, peer-reviewed papers
Translated title: Turning proceedings articles into archival, peer-reviewed papers
Creators - without role: Burn J. Lin - Taiwan Semiconductor Manufacturing Company (Taiwan)
Publication Details: Journal of Microlithography, Microfabrication and Microsystems, Vol.5(2), 020101
Identifiers: 9957767819206774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Editorial