What can semiconductor fabs do for the green earth?

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Journal of Micro/Nanolithography, MEMS, and MOEMS, 卷.7(2), 020101

2008

摘要

Electronic

Optical and Magnetic Materials

Atomic and Molecular Physics

and Optics

Condensed Matter Physics

Mechanical Engineering

Electrical and Electronic Engineering

url

https://doi.org/10.1117/1.2951889檢視

已出版(紀錄版本) 開放

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題名: What can semiconductor fabs do for the green earth?
翻譯題名: What can semiconductor fabs do for the green earth?
創作者：: Burn J. Lin (作者) - Taiwan Semiconductor Manufacturing Company (Taiwan)
學術資源類型: 社論
出版日期: 2008
出版資訊: Journal of Micro/Nanolithography, MEMS, and MOEMS, 卷.7(2), 020101
語言: 英語