Abstract
The purpose of this dissertation is to analysis and measure the characteristics of the highly densed plasma, which is for the use of growing the carbon nanotube. Besides, this dissertation also discusses the change of the characteristics of plasma as the different ration of the mixture of ammonia and acetylene, which is the necessary for growing the carbon nanotube. In addition, hope this dissertation can contribute us to discuss the effect of the characteristics of plasma on the growth of the carbon nanotube. Furthermore, we can estimate the strength of the electronic field as being in the process of growing the carbon nanotube.Carbon nanotobe was found by Iigima as he grew the powder of C by ark discharge. Is was a new product as a leftover found accidentally on the process of filtering cathode carbonaceous bar. Because of its special construction, wonderful mechanical, and special electric conductor, it has much special application. We can also use the way of PECVD and TPCVD to grow Carbon nanotobe. In my lab, we mainly use HDP-CVD to develop carbon nanotobe.As for the measurement of plasma, this experiment mainly adopted Langmuir probe to measure the characteristics of plasma. On the contrary to other ways of measurement, Langmuir probe can partly measure plasma by extending to the inside of plasma directly. However, its weakness is disturbing the plasma. In the process of the measurement in this experiment, I analysed and measured the characteristics of the plasma of Ar first to have the basic understanding of the characteristics of the origin of plasma. Consequently, I measured and analysed the characteristics of plasma whichAs for the measurement of Ar plasma, the result indicates that being with the increase of absorbing power, the density of the plasma of Ar also increases. Moreover, as increasing the pressure of Ar, the density of the plasma of Ar also increase. In addition, the temperature of electron declines as the rise of the pressure of R. It also makes the plasma potential decline. As for measuring ammonia, the big difference of the result of the measurement from Ar is that the density of the plasma of ammonia is declining as the increase of the pressure. The main reason causing this difference is that the ion is easily have recombination-reaction with minus ion. This recombination makes the number of isolated particle decreases. As for the measurement of the gas mixed with ammonia and acetylene, there is a trend that the density of plasma declines with the increase of acetylene.