Abstract
The research is “Development of In-Situ MEMS-Based Heating System for Dynamic Analysis of the Quaternary Compound Semiconductor in Transmission Electron Microscope”. For this research of TEM in-situ observation, we develop the heating process perform in TEM by TEM heating holder. Instead of the heating by traditional resistance wires, the heating resource has implemented by MEMS technology to fabricate the micro heater. The MEMS-Based micro heater has high performance in heating rapidly & cooling, settling time shortly and reducing significantly the thermal drift caused by heating & cooling. Then the four point resistance feedback is used to precisely control the temperature. The fabrication processes of MEMS-Based micro heater include photo lithography, LPCVD, PECVD, RIE(reactive ion etching), wet etching and E-Beam evaporation. After the MEMS process, N&K analyzer. AFM, SEM and Four-Point Probe were used to detect the MEMS-Based micro heater. The analysis of solar cell absorption layers (Se/Cu/Sn/Zn/SLG) are prepared by sputter and E-Beam evaporation. After that, the FIB(focused ion beam) is used to prepare the TEM sample. In order to avoid the second phase deposition, RTA(rapid thermal annealing) process were performed in TEM, moreover it observes the high resolution video related to timeline and analysis by EDS(energy dispersive spectrometer) and DP(diffraction pattern). Key words：In-situ TEM（Transmission electron Microscope）、TEM（Transmission electron Microscope）、MEMS（Microelectromechanical Systems）、Dynamic Analysis、Rapid thermal annealing（RTA）