Abstract
Recently, researches about manipulation and analysis of bio-particles by MEMS devices are increasingly growing because of technology and fabrication development. It becomes an important field of bio-technology. Its purpose is to integrate many functions into a Lab-On-a-Chip system for full functional disease detection and analysis. Today, there are many technology have been presented, such as: microgripper, micro filter and etc. But each of them has some critical drawbacks and restrictions. Therefore, we aim at developing a bio-chip which could separate large numbers of cells easily and efficiently. In this thesis, we utilize optical tweezers combining a bio-chip designed with micro channels and DEP (dielectrophoresis) to sort cells. It is a laminar flow in the microchannel. We add many side-channels for deceleration. By applying input AC voltage within specific frequency range on the micro electrodes, cells could be deflected and levitated in our device to sort much efficiently. Later, we use linear optical pattern generated by holographic optical tweezers to separate cells. First of all, through numerical simulation software CFDRC, the design concepts are verified and then realized by MEMS fabrication process. Finally, we use polystyrene beads in place of cells to demonstrate the feasibility and the functions of this bio-chip.