Abstract
Scanning micromirrors are one of the key components in MOEMS (Micro-opto-Electro- mechanical systems). They have been applied for a variety of applications such as optical switches, optical data storage, barcode readers, laser printers and image displays. Micro scanners via various MEMS techniques generally have the advantages of low power consumption, high speed actuation, compact size and low cost due to batch fabrication. Compared with surface type micromirrors, bulk micromachined scanning mirrors have many advantages such as larger scan range and thicker mirror. Therefore, in this research we present a novel <110> micromirror with vertical comb-drive actuators via wet etching to simplify the process with low cost process but still hold high performance. The springs are formed by boron diffusion that can make silicon resistive to KOH etching. Our device targets for a wide-angle but low cost scanning applications. We have done most of the theoretical analyses and numerical simulations including the relationship between electrostatic torque and vertical gap of vertical comb actuators, the optimum tilt angle of V-shape springs. Finally, we demonstrate the feasibility of the <110> scanning mirror with vertical comb actuators. This research covers most of fundamental studies and gives some suggestions and comments for the future design.