Abstract
In optical transmission systems, variable optical attenuators (VOAs) are fundamental components. They play important roles in equalizing channel intensity levels in Dense Wavelength Division Multiplexing (DWDM) systems and flattening the gain spectrum of optical amplifiers. Variable optical attenuators based on planar lightwave circuits (PLCs) are attractive in the ability to integrate with other optical devices. A novel structure of a variable optical attenuator is proposed in this thesis. The configuration of the VOA includes a fiber groove that the single mode fiber and Grin fiber will be placed, an output waveguide, and a driven mirror with a flexible spring to fix it. The V-shape thermal actuator is designed to drive the mirror. We utilize the incident angle changes between two medium under the TM polarization to manipulate the optical power. Mask layouts and fabrications follow the device design. We use SOI (silicon -on-insulator) wafers to manufacture the VOAs by Micro-Electro-Mechanical Systems (MEMS) technology and then measure them finally.