Abstract
The LIGA technology is a potential fabrication technology of micro machining with a high commercial value in complicated shapes, high aspect ratios and mass production applications. Development of the LIGA process began at the Karlsruhe Nuclear Research Center, West Germany in the late 1970s. “LIGA” is a German abbreviation of three major process steps: lithography (Lithographie), electroforming (Galvanoformung), and moulding (Abformung). Micro-devices produced by electroforming processes possess a variety of applications in different fields. This thesis will introduce the principles and processes of the LIGA technology, and will investigate how to manufacture metallic nozzle plates used in the micro-electro-mechanical system (MEMS) by this promising technology. In the LIGA process, stainless steel or other materials such as ceramics, metals, plastics, or a combination of these materials could be used as the substrate. Specific geometrical photoresist patterns are created on the substrate by the lithography processes. The electroforming process is then proceeded consequently such that the metallic micro-scale structure with specific outline could be obtained on the conductive substrate. This experiment would produce different shape metallic micro-scale structures desired by different photoresist patterns; find the relation between the thickness of the electroforming layer and the time in various current densities (ASD). Moreover, the growth mechanism of the metallic micro-scale structure during the electroforming process was also discussed.