Abstract
Micro-Electro-Mecha-Optical system, aiming at optical applications in MEMS, uses deformable mirrors to conduct adaptive optics devices and to change the focal length of the mirror. This thesis designed multi-layer deformable micromirrors with electrostatic actuation to adjust the focal length based on surface micromachining. The content of this thesis can be separated into two parts: analysis and fabrication. In analysis, plate and shell theories are used to obtain the relations among deformation, thermal stress, and applied voltage. A series of simulations, by using IntelliSuite, are performed to investigate the process- and voltage-induced deformation under various parameters for a focusing micro-mirror. Robust designs are obtained by using Taguchi method. The aim of simulations is to provide the characteristics of variables for the device, which may help the designers for choosing better parameters when fabricated. In fabrication, sectored structures with 500 um diameters are fabricated successfully. Curvature radius is measured which is about 400 um.