Abstract
Recently, neuroscience is becoming a potential subject and held a lots attraction. The development of neuroscience not only promotes the progress of the medicine and pharmacology, but, the most important, the understanding of human being. The techniques of neural recording can be divided into two parts: intracellular recording and extracellular recording. For the noninvasive extracellular recording, long term measurement is available but the precision is still inferior to intracellular recording. Multi-Electrode array (MEA) is usually involved in a modern extracellular recording system as a fundamental tool. It has the ability to record large amount of samples and the synchronized activities. In this thesis, we develop a CMOS compatible transducer design with the ability of integrating stimulation and recording. The 2D sensor arrays are based on OSFET, which is a MOSFET without polygate, leading direct contact between gate oxide and electrolyte. Taking the advantage of micromachining technique, a hole structure is built above the sensor for a more intimate interface. The back-end readout circuit, with a tunable gain, is just implemented under the structure for avoiding additional disturbance from bonding. The chip is fabricated in a standard CMOS process with several post-CMOS process steps and package to form microstructure and ensure its stability in physiological saline. The readout circuit is comprised of a current amplifier and an I-V converter and associated with each sensor. A multiplexer is utilized for choosing the working unit.