Abstract
Chemical vapor deposited diamond thin firm technique is generally applied in the years. Because of the characteristic of polycrystalline diamond, it must be polished in final processes to improve the quality of surface for widely application. In many polishing technologies, thermo chemical polishing and chemical assisted mechanical polishing and planarization (CAMPP) both have the advantages: large area polishing, fine polished surface and low equipment cost. In this article they will be experimented and analyzed. To realize the effect of the parameters in thermo chemical polishing and chemical assisted mechanical polishing and planarization, and to achieve large area polishing, they are analyzed for the variation of surface roughness, material removal rate…etc. And a theory model is set to compare the ideal value and true value, to know the polishing process in thermo chemical polishing and chemical assisted mechanical polishing and planarization. Keywords: Chemical vapor deposited diamond thin firm (CVDD), thermo chemical polishing, chemical assisted mechanical polishing and planarization (CAMPP)