Abstract
Abstract This research focuses on the controller design and implementation for the MEMS-fabricated biology object manipulation device (LAMA), which has been developed by our research group. The MEMS device utilizes micro actuator fingers to vary the flow field around the target micro-biology for micro-scale manipulation, which is a non-contact, harmless, costless, and scale matching manipulation method. In this research, first, I derive the dynamic model of micro actuator and defines the operation frequency. Then, I use Matlab / simulink / xPC to design both manual and automatic real-time controls, which provides users a flexible operation platform with adjustable control parameters. For the hardware, driving signal processing circuit, CPLD decoding circuit and position scanning feedback circuit have been developed in the research. As for software, optimal moving path calculation program, Matlab/xPC real-time control module and scanning position-simulation feedback control module have been developed successfully