Abstract
Preparation carbide thin film by useing high alloy target together with reactive gas methane
- Title
- (CrNbTaTiZr)Cx薄膜的機械性質與微結構之研究
- Translated title
- (CrNbTaTiZr)Cx薄膜的機械性質與微結構之研究
- Creators
- 陳思寰
- Contributors
- 林樹均 (Advisor)
- Awarding Institution
- 國立清華大學, 材料科學工程學系; Masters
- Theses and Dissertations
- Masters, 國立清華大學, 材料科學工程學系
- Language
- Traditional Chinese
- Resource Type
- Thesis
- Date published
- 2012