Abstract
using W(N)、TiW(N)、Ru、RuTi、RuTa as bottom electrodes,do RTO or RTN 60sec. then do somthing
- Title
- DRAM運用之Ta2O5薄膜電容下電極材料的研究
- Translated title
- DRAM運用之Ta2O5薄膜電容下電極材料的研究
- Creators
- 黃俊凱
- Contributors
- 吳泰伯 (Advisor)
- Awarding Institution
- 國立清華大學, 材料科學工程學系; Masters
- Theses and Dissertations
- Masters, 國立清華大學, 材料科學工程學系
- Language
- Traditional Chinese
- Resource Type
- Thesis