Abstract
In this thesis, a novel CMOS two-dimensional (2-D) octagonal angular vertical comb-drive (AVC) micromirror is designed and fabricated for the application in a micromirror-based optical-tweezers system. The CMOS 2-D micromirror has the advantages of low cost, high fill factor, and capability of integration with readout circuit. According to the analysis, the proposed mirror has larger rotation angles, compared to the conventional rectangular staggered vertical comb-drive (SVC) micromirror. Rotation angles of ±2.1° and ±1.8° with respect to the mirror- and gimbal- axis can be achieved in this AVC octagonal 2-D micromirror. In addition, the controller, combining adaptive control and sliding control, is designed to compensate the nonlinear torque and the parametric uncertainties of the vertical comb-drive micromirror. The numerical simulation results show that the micromirror can follow the desired trajectory of 10-Hz sinusoid with tracking error of less than 0.001° in 0.01 seconds. Finally, an image processing interface is realized for cell recognition. The proposed micromirror, the nonlinear controller and the designed interface are integrated into the optical-tweezers system in application of cell manipulation and tissue construction.