Abstract
The Fabry-Pérot filter (FPF) fabricated by the technology of micro-opto-electro-mechanical system (MOEMS) provides several advantages such as miniaturization and multiplicity. Devices can be scaled down by the development of miniaturization with the improvement of integrated circuits (ICs) fabrication. Multiplicity enables the devices to be mass produced in thousands components on a single wafer, as a result, it reduces the fabrication cost and makes the commercialization of micro-spectrometers possible. The micro-scale devices create new applications in micro- spectroscopy, as a result, the FPF fabricated by MOEMS technology provides a promising opportunity for micro-spectroscope to be commercialized. In this work, the Fabry-Pérot filters with a large aperture size of 300 μm was designed and fabricated. Another feature of this work is that the zinc oxide (ZnO) was utilized as the sacrificial layer, which would be etched by diluted hydrochloric (HCl) acid in the releasing step. The measured transmittance of a released FPF was 41.6% with referred medium of bare silicon wafer at no applied voltage, and the measured tuning was from 2180 to 1992 nm in the NIR range at the applied voltage from 0 to 7.5 V.