Abstract
In recent year, the quality of life draws more and more attention, which people begin to care about details of daily life. On the other hand, with the increase of technology level, the mobile devices like smartphone are easily used in daily life. In addition, the sensor of near-infrared (NIR) wavelength has great accuracy on examined technology. Because of paying more attention to our living days, the NIR detector has an excellent potential to be put in use in our life like plastics test or bioinstrumentation and so on. This study describes the design and fabrication of wavelength-tunable MEMS-based band-pass filter on silicon which it changes the air gap by voltage.