Abstract
Recently, with the development of biotechnology, many difficult problems of the bio-fields have been resolved. However, the development of biotechnology usually costs money and takes much time to go through required biochemical process. Hence, the development of micro-system tools could help speed up the experimal progress and save much unnecessary waste, because the scale fits to the size of the biological molecules and cells. The MEMS (Micro-Electrical-Mechanical-System) technique provides a possible opportunity to produce the various devices which can be used to separate, position and analyze the bio-molecules. In the past, many groups have reported a variety of different devices to manipulate the bio-sample, such as optical tweezers, magnetic tweezers, and microgripper and so on. However, these devices are usually either large size or complicated fabrication process. Here, we integrate several different components in the single device and use the dielectrophoretical (DEP) force to manipulate the target bio-sample. In this thesis, we start with the survey of literatures. Then, by using the CFD-RC software, we simulate the results of our device. The integrated device is fabricated via the MEMS technique. Finally, we evaluate the functions of our device by using the polystyrene beads and biological cells and report the experimental results.