Abstract
Design high natural frequency □mechanical resonators for communication applications. This high frequency □mechanical resonator is designed based on breaking GHz barrier, tiny size, high Q’s, zero DC power consumption and integrate with CMOS IC process. □mechanical resonators are used to replace filters, oscillators on typical transceivers. Design high frequency □mechanical resonators by changing geometry structure, anchoring type and vibration mode. There are edge-clamped disk resonator and carbon nanotube □mechanical resonator designed. Use ANSYS and CoventorWare software to simulate the natural frequency and the electrostatic-structure coupling effect. Check the frequency is high enough or not and the electrostatic displacement is larger enough for detecting. Edge-clamped disk resonator’s frequency is about 510MHz and carbon nanotube resonator exceeds 1GHz. The simulated results are very close to predicted values. The processes are schemed by CoventorWare tool and the energy losses of carbon nanotubes resonator are also indicated. Edge-clamped disk resonator has six masks to manufacture. The natural frequency isn’t high enough and the losses are difficult to predict. Carbon nanotubes resonator is a 2 masks process with excellent mechanical properties and high frequency. The losses predicted are small during the nano-scale. It is a proper candidate as a high frequency □mechanical resonator for communication applications.