Effect of Substrate bias on Structure and Properties of VN Thin Films Deposited by Unbalanced Magnetron Sputtering

Thesis

Tsui, Yu-Hsiang

Masters, 國立清華大學, 工程與系統科學系

2016

Abstract

氮化釩

磁控濺鍍系統

基板偏壓

薄膜

vanadium nitride

thin films

unbalanced magnetron sputtering

substrate bias

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Title: Effect of Substrate bias on Structure and Properties of VN Thin Films Deposited by Unbalanced Magnetron Sputtering
Translated title: Effect of Substrate bias on Structure and Properties of VN Thin Films Deposited by Unbalanced Magnetron Sputtering
Creators: Tsui, Yu-Hsiang
Contributors: Yu, Ge-Ping (Advisor)
Huang, Jia-Hong (Advisor)
Awarding Institution: 國立清華大學, 工程與系統科學系; Masters
Theses and Dissertations: Masters, 國立清華大學, 工程與系統科學系
Language: English
Resource Type: Thesis
Date published: 2017