Fabrication of Si-rich Silicon Carbide Film and Solar Cells by Low-Temperature Plasma-Enhanced Chemical Vapor Deposition

Thesis

Wang, Jer-Fu

Masters, 國立清華大學, 物理系

2013

Abstract

碳化矽

化學氣相沉積法

太陽能電池

SiC

PECVD

Solar cell

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Title: Fabrication of Si-rich Silicon Carbide Film and Solar Cells by Low-Temperature Plasma-Enhanced Chemical Vapor Deposition
Translated title: Fabrication of Si-rich Silicon Carbide Film and Solar Cells by Low-Temperature Plasma-Enhanced Chemical Vapor Deposition
Creators: Wang, Jer-Fu
Contributors: Pan, Ci-Ling (Advisor)
Awarding Institution: 國立清華大學, 物理系; Masters
Theses and Dissertations: Masters, 國立清華大學, 物理系
Language: English
Resource Type: Thesis
Date published: 2014