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Failure Mechanism of Al-Cu Wedge-wedge Bonding under Electromigration Test
Thesis

Failure Mechanism of Al-Cu Wedge-wedge Bonding under Electromigration Test

Tsau, Yan-Wen
Masters, 國立清華大學, 工程與系統科學系
2017

Abstract

Al打線 電遷移 高功率模組 介金屬化合物 Al wire bonding electromigration power modules IMC
Wire bonding technology has been utilized in semiconductor packaging industry for electrical connections. Due to low cost, good conductivity, softness and the ability to be bonded under room temperature, Al wire bonding has been considered as a potential candidate to replace the Au and Cu. This study investigates microstructural evolution and failure mechanisms of 2 mil Al wedge-wedge bonding bonded on Cu pad under current density of 2 and 7×10^4 A/cm^2 at 150 ℃. During electromigration tests, resistance decreased first and then increased till wires failed. Though the growth of intermetallic compounds (IMC) at the bonded interface change insignificantly after electromigration tests, the thickness of IMCs at the bonding interface where electron flowed form Cu to Al is usually larger than that at the interface where electron flowed in the opposite direction. Furthermore, considerable grain growth, bamboo structure and bamboo nodes were observed in Al wires. The corresponding mechanism of IMC growth at the interface, resistance change and as well as the formation of bamboo nodes were discussed.

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