Abstract
Equipment Health Index indicates the equipment condition with a score, which not only helps manufacturing engineers grasp the current manufacturing circumstances but also provides suggestion for the schedules of preventive maintenance. This thesis is to design a generic algorithm, the novel combination of methods, to portray scores for the health condition of equipments. Besides, the use of this algorithm to better characterize processes and provide opportunities for real-time adoption may improve cycle times and lower engineering costs by reducing the number of processing runs necessary to tune and retune a given process. In addition, this approach reduces equipment downtime by providing real-time diagnosis of tool health and process condition and proactive, scheduled maintenance.