Abstract
In this research, a micro and nano hybrid structure was realized by using simple micro and nano processing methods. Micro-structures generated by using exposure, development and etching processing; nano-sturctures were generated by using AAO processing. Two different nano-structures were fabricated using this process, 50 nm nano-pores by using oxalic acid as electrolyte and 100 nm nano-pores by using phosphoric acid as electrolyte. Furthermore, for oxalic acid, second anodization was required to obtain nano-pores, also for both oxalic acid and phosphoric acid second anodization was used to obtain more ordered nano-pores. The fabricated structures were used as molds in a nano-imprint lithography process where the structures were successfully transferred to a transparent polymer film. This transparent film can be applied to optical films such as the diffuser in a back lighting module. The imprinted samples were tested for transmittance and compared with a “blank” sample, which has no nano-structures. Obvious increment in transmittance can be observed compared with the “blank” sample.