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Mo在Al2O3單晶之界面結構分析
Thesis

Mo在Al2O3單晶之界面結構分析

許家弘
Masters, 國立清華大學, 物理系
1998

Abstract

X光 介面 X光掠角繞射 反射率 薄膜 氧化鋁 X-ray interface grazing incident X-ray diffraction reflectivity thin film Mo Al2O3(Sapphire)
By using the X-ray reflectivity we get the thickness, relative density, roughness of surface and interface of four thin film samples.We find that the third sample,Mo(100)/Al2O3(1-102),has the perfect quality after using the conventional theta-two theta scan and getting the interference fringes near the Bragg angle. Also we note that the thickness of thin films detected by quartz oscillator during the formating process and the analysis of X-ray reflectivity,even if the interference fringes from the theta-two theta scan, are quite different ! After the grazing incident X-ray diffraction(GIXD),we obtain the atomic in-plane arrangement models at the interface of four samples initially.We also hope that after the X-ray rod scan we could find the whole messages of the interfaces finally.

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