Abstract
In this thesis, we present the design and fabrication of directional couplers and multi-mode interferometers (MMI) for realizing micro-particle transport and switch through optical force. The evanescent field of the integrated photonic devices is able to propel a micro-particle to flow and control the trajectory of particle movement, according to the optical field distributed within the devices. By launching the TM polarized laser at the power of 50mW, the micro-particles can be transported to different output ports by selecting wavelengths between 1540nm and 1550nm. Optical force acting on the micro-particle is calculated by MATLAB, and the field of force is used for optical manipulation. Coupling lengths of directional coupler and MMI as a function of optical wavelengths are also analyzed by MATLAB and confirmed by experiments. It shows that the calculated coupling length agrees well with the results of experiments, where the trajectory of the micro-particle follows the optical interference pattern in the photonic device.