Abstract
Micro scanning mirrors developed by Microsystem technology have been widely developed because of the widespread applications in displays, optical switches, interferometric system, optical spectroscopy and biomedical imaging. There has been increasing interest recently in micro scanning mirrors actuated by the vertical comb-drive actuators due to the advantages of low power consumption, high speed actuation, compact size and low cost from the batch fabrication. Quite a few groups have studied the micro scanning mirror actuated by vertical comb actuators. However, based on the marketing concern, the control of the fabrication cost and the requirement of the performance are getting more important. A low cost but still with high performance, a large scanning angle, microsystem mirror is essential. In this research, we used <110> wafer and fabricate the vertical comb actuators via wet etching process to approach the goal of cost down. A boron diffused process was utilized to fabricate the V-shape spring which can improves the scanning angle and prevent the side stiction phenomenon effectively. In addition, a grating on mirror structure was also studied in this thesis to broaden the applications. We have done the design, fabrication process, theoretical analysis, numerical simulation, including the generated torque and the V-shape spring, and the experimental performance measurements for the microsystem mirror in this research. We also verified the feasibility of the low cost and high performance scanning mirror. The optimal design and some preliminary fabrication of the grating have been done and reported in this thesis.