Optimizing the Response of Thin Film InN Based Gas Sensor Grown by RF-MOMBE for Ammonia Sensing

Thesis

Kumar Avinash

Masters, 國立清華大學, 奈米工程與微系統研究所

2015

Abstract

半導體氣體感測器

超薄氮化銦薄膜

電阻式氣體感測器

溫度調變

Semiconductor Gas Sensor

Ultra-Thin InN film

RF-MOMBE

Resistive type Gas Sensor

Temperature Modulation

因申請專利緣故，資料延後公開

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Title: Optimizing the Response of Thin Film InN Based Gas Sensor Grown by RF-MOMBE for Ammonia Sensing
Translated title: Optimizing the Response of Thin Film InN Based Gas Sensor Grown by RF-MOMBE for Ammonia Sensing
Creators: Kumar Avinash
Contributors: Yeh,Jer Liang (Advisor)
Awarding Institution: 國立清華大學, 奈米工程與微系統研究所; Masters
Theses and Dissertations: Masters, 國立清華大學, 奈米工程與微系統研究所
Language: English
Resource Type: Thesis
Date published: 2016