Orienting Silicon-Containing Block Copolymer Thin Films via Entropy and Surface Plasma Treatment

Thesis

Lu, Kai-Yuan

Masters, 國立清華大學, 化學工程學系所

2016

Abstract

嵌段共聚物

薄膜

表面電漿處理

熵驅動

block copolymer

PS-PDMS

entropic driven

surface plasma

thin film

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Title: Orienting Silicon-Containing Block Copolymer Thin Films via Entropy and Surface Plasma Treatment
Translated title: Orienting Silicon-Containing Block Copolymer Thin Films via Entropy and Surface Plasma Treatment
Creators: Lu, Kai-Yuan
Contributors: Ho, Rong-Ming (Advisor)
Awarding Institution: 國立清華大學, 化學工程學系所; Masters
Theses and Dissertations: Masters, 國立清華大學, 化學工程學系所
Language: English
Resource Type: Thesis
Date published: 2017