Abstract
In this study﹐the co-sputter method was used to deposit PZT-Pt ferroelectric thin film﹒After post annealing﹐we found that the microstructure of PZT-Pt thin film had a〝nanocomposite〞structure﹐in which﹐Pt clusters were formed and dispersed in the PZT matrix﹒From composition analysis and electric property measurements﹐it was found that this PZT-Pt nanocomposite films showed an enhanced remanent polarization and a significant polarization signal was still obtained under a low applied voltage of 1 volt﹒It indicates a〝low voltage drive〞FeRAM can be fabricated with such a nanocomposite thin film﹒