Abstract
用電子顯微鏡觀察磷離子佈植矽單晶之缺陷並分析其特性。
- Title
- P佈植矽的微粒結構缺陷之研究
- Translated title
- P佈植矽的微粒結構缺陷之研究
- Creators
- 王紀中 (Author)
- Contributors
- 陳力俊 (Advisor)
- Awarding Institution
- National Tsing Hua University; Masters
- Theses and Dissertations
- Masters, National Tsing Hua University
- Resource Type
- Thesis
- Language
- English