Solving the Loading Balance Problem in the Photolithography Area

Thesis

Hung, Hsiao-Ching

Masters, 國立清華大學, 工業工程與工程管理學系所

2016

Abstract

負荷平衡

拆批

基因演算法

區域搜尋

模糊邏輯控制

Loading Balance

Lot Splitting

Hybrid Genetic Algorithm (HGA)

Local Search

Fuzzy Logic Controller (FLC)

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Title: Solving the Loading Balance Problem in the Photolithography Area
Translated title: Solving the Loading Balance Problem in the Photolithography Area
Creators: Hung, Hsiao-Ching
Contributors: Chen, James C. (Advisor)
Awarding Institution: 國立清華大學, 工業工程與工程管理學系所; Masters
Theses and Dissertations: Masters, 國立清華大學, 工業工程與工程管理學系所
Language: English
Resource Type: Thesis
Date published: 2017