Abstract
Base on the repeatable、convenient、high storage capacity，and the low cost cause of the mass mass production，the phase change optic disc already become the major high storage capacity media, obviously. And recently, the DVD system was developed very fast，the high storage density was the major trend of the phase change optic disc. The Ge-Sb-Te material system can’t follow this trend, this is also why we choose the Ag-In-Sb-Te material system. But the Ag-In-Sb-Te material system was found the cyclability only have 103 times, evident that this system’s cyclability is lower than former system’s. According to literatures, the reason of cyclability can’t be promoted were very mush, and we aimed at the phase segregation of Te, to study how the improve this problem. We try to used the way whose address in literatures, when sputtering the Ag-In-Sb-Te target mixed the nitrogen gas, promoted the Te and N bond together. The fetter force would confine Te not to segregated self, to achieve our purpose. More advance, we didn’t use the RF power in Sputter chamber to decompose nitrogen, we decompose the nitrogen molecule directly by microwave outside the chamber, attempt to decompose the nitrogen molecule become atomic nitrogen to promote the bonding probability and it’s efficiency. We using the results of DSC analysis to operated by Kissinger equation to prove the method of Microwave enhance N2 atoms increase the activation energy of recroding layer approximately 0.3~0.6 eV, and the Absorbance results of FTIR measure to prove the Te-N bond increase. In cyclability, a four layer structure of the phase chage disc used in the analysis is polycarbonate substrate / ZnS:SiO2 100nm / Ag-In-Sb-Te 200nm / ZnS:SiO2 180nm/ Al-Cr 100nm. The results of the disc dynamic test also observe our Microwave enhance N2 atoms method was 3times than the RF enhance N2 molecule method at cyclability.