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Synthesis and Electron Field Emission Properties of the Carbon nanotubes by MPECVD System
Thesis

Synthesis and Electron Field Emission Properties of the Carbon nanotubes by MPECVD System

C. T. Hsu
Masters, 國立清華大學, 材料科學工程學系
1999

Abstract

奈米碳管 電子場發射性質 微波電漿輔助化學氣相沈積 拉曼散射光譜 無電電鍍 竹節狀結構 啟始電場強度 觸媒 Carbon nanotubes Electron Field Emission Property MPECVD Raman Electroless- plated Bamboo-shaped structure Onset emission field catalyst
Carbon nanotubes were synthesized in a mixture of methane and hydrogen as precursors by the microwave plasma enhanced chemical vapor deposition (MPECVD) system equipped with a dc bias to the substrate of silicon. By varying carbon nanotubes form, catalyst particles, and electroless plating time, the field emission characteristics were compared. The onset emission field as low as 1.8 Vμm-1 can be achieved (through the form of a “tubes on tube”) in comparison with other carbon-based electron field emitters. This fact is mainly attributed to the high aspect ratio, low tip radius of curvature, well-aligned morphology, and the removal of hydrogen from the carbon nanotubes. Carbon nanotubes catalyzed by electroless plating Pd for 20 minutes have the highest array density, best morphology, and field emission characteristics than other methods or metal catalysts in our MPECVD system. Raman scattering spectra show that all the carbon nanotubes have a graphite structure. SAD and X-ray analysis evidenced that Pd2Si and Ni3Si2 are also the good catalysts for carbon nanotubes synthesis. TEM analysis shows a bamboo-shaped structure of the “tubes on tube” carbon nanotubes. The possible growth mechanisms of the “tubes on tube” form carbon nanotubes will be discussed.

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