Abstract
The goal of this thesis is to develop photo-sensing array, achieving “ bio lab on IC” with CMOS circuit and LTPS panel respectively. To detect low light intensity, PFM (pulse frequency modulation) is a good solution. PWM(pulse width modulation) pixel is another way of extending pixel response resolution. In this work, 0.1LUX light with λ=555 is successfully detected by using PFM circuit realized by CMOS process. To implement the sensing array on LTPS panel, the dark current and photo response of P-I-N diode are analyzed of simulation results of PWM pixel designed to be realized by LTPS process show that 10LUX light can be successfully detect under a clock frequency of 250HZ.