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UBM中無電鍍鎳與以機械合金法製備 錫銀銅銲料之界面反應探討
Thesis

UBM中無電鍍鎳與以機械合金法製備 錫銀銅銲料之界面反應探討

高斯崇
Masters, 國立清華大學, 材料科學工程學系
2003

Abstract

機械合金 無鉛銲錫 錫銀銅 複合銲料 電子微探儀 mechanical alloying lead-free solder SnAgCu composite solder EPMA
Mechanical alloying (MA) process is considered as an alternative approach to produce solder materials. In this study, the effect of Cu concentration in the ternary Sn-3.5Ag-xCu (x=0.2, 0.7, and 1 wt.%) solder by mechanical alloying (MA) was investigated. (Cu, Sn) solid solution was precipitated as Cu6Sn5 IMC which was distributed non-uniformly through the microstructure. Cu6Sn5 IMCs present in the SnAgCu solder with high Cu composition cause the as-milled MA particle to fracture to a smaller size. Distinction in morphology of as-milled MA powders with different Cu content was revealed. When the Cu concentration was low (x=0.2), MA particle aggregated to a spherical ingot with the large particle size. For higher Cu concentration (x=0.7 and x=1), MA particle turned to flakes with smaller particle size. The distinction of the milling mechanism of Sn-3.5Ag-xCu (x=0.2, 0.7, and 1) solder by MA process was discussed. An effective approach was developed to reduce the particle size of the SnAgCu solder down to less than 100 μm by doping the Cu6Sn5 nano particle during MA process. In addition, the DSC results also ensured the compatibility to apply the solder material for the annealing process. Besides, electroless Ni-P (EN) under bump metallization (UBM) has been widely used in electronic interconnections due to the good diffusion barrier between Cu and solder. Solder joints after annealing at 240˚C for 15 min were employed to investigate the evolution of interfacial reaction between electroless Ni-P/Cu UBM and SnAgCu solder with Cu concentration from 0.2 wt.% to 1.0 wt.%. After deliberately quantitative analysis with an electron probe microanalyzer, the effect of Cu content on the formation of IMCs at SnAgCu solder/electroless Ni-P interface would be investigated. With the aid of microstructure evolution, quantitative analysis and elemental distribution by x-ray color mapping, the presence of Ni-Sn-P phase and P-rich layer could be revealed. SnAgCu composite solder reinforced with Cu6Sn5 nano dispersoids was investigated for the related interfacial reactions. The growth of the IMCs formed at composite solder/EN interface was retarded due to the stable distribution of Cu6Sn5 dispersoids in the solder after annealing. In addition, the contact angle of MA solder paste was less than 25˚ and exhibited good wettability.

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