Abstract
Abstract To date, live cell imaging has attracted many researchers’ interests due to its ability to observe intracellular structures and molecular interactions within a cell that might facilitate progresses in the fields of biology and medical applications. With a resonance-based device, researchers can propose a label-free cell imaging system. The performance of the cell imaging system correlates to its sensing capability of refractive index change of surrounding environment. In this research, we work on designing and fabricating a high figure of merit refractive index sensor to provide a future prospect on enhancing the resolution for the cell imaging system. We will first explain the idea of the design. After, we clarify the mechanism and characterize the sensor in simulation. For the fabrication process, we introduce nanoimprint lithography to pattern and following either lift-off or RIE process to construct our devices. Finally, we conduct a measurement by microwave Fourier transformed infrared microscopy to verify the concept from the simulations.